Resolving surface details with reflection and fluorescence video-confocal profilometry

TitleResolving surface details with reflection and fluorescence video-confocal profilometry
Publication TypeJournal Article
Year of Publication2007
AuthorsBenedetti, PA, Guidarini, D, Cristoforetti, G, Legnaioli, S, Palleschi, V, Salvetti, A, Spiniello, R, Tognoni, E
JournalMICRON
Volume38
Pagination104–108
ISSN0968-4328
Abstract

Video-confocal profilometry has been exploited to characterize reflecting and non-reflecting surfaces in materials with tilted and corrugated areas. An alternative method based on fluorescence detection has been developed and tested to characterize metal surfaces modified by intense laser irradiation. Combined representations of surface topography have been obtained on the basis of both reflectance and fluorescence signals. A discussion of results and problems encountered in reflection and fluorescence based techniques is provided. (c) 2006 Published by Elsevier Ltd.

DOI10.1016/j.micron.2006.07.005